Dimensional and Stress Metrology for Bow and
Warp measurements on crystalline, thin film
materials, and minipanels.
New metrology for X-ray mirrors (Video demo).
Quantum Efficiency (QE) Uniformity
measurements, using white light and color
Glass Bow, Roller Wave, full Glass substrate
scalable metrology (0.5 m x 1 m, 2 m x 2 m, and
Interferometric Probe a Non Contact Wafer Thickness and Wafer Topo- and
Low Coherence Metrology for:
For Measurement videos on selected models please click here.
|Wafer thickness measurement|
|Trench depth measurement|
|Membrane thickness measurement|
|Laser and LED application|
|MEMs tomography applications|