For detailed information about our products and services please contact us
and request our brochures and technical product information.
IP / Terms of use

Model X: for X-ray mirrors and semiconductor stress

Metrology for:

X ray Silicon optics
Stress in coated semiconductor structures
Stress tensor components
 (in XY plane)
Topography of irregular surfaces

While nanoradian probe is available commercially,
the standard tool provides micro-radian range  

Example of measured mirror surface:

Example of measured surface of the mirror having radius of
about 90 m is shown Figures below. Tool has also data fitting
capability allowing user to calculate surface parameters and

Tool allows user to fit wide variety of surface models, and
calculate residuals. Difference between the fitted and measured
surfaces – can be exported in a spread-sheet format.
We observe quite satisfactory agreement for all central points
(blue points).

Wafer curvature and stress

For full report please contact
Your name:
Your email address:
Your phone number:
For more information, product application note, and
brochure including detailed specification please fill
information request form
Please see short video demonstration.  

Full contact information
ZebraOptical Optoprofiler: Model X