|For more information about our products and services please contact us
and request our brochures and technical product information. Please, note,
that all specifications are subject to change without notice.
and model information please contact sales or request catalog below) :
ZebraOptical Optoprofiler: Models P-1D and P-2E
Tool for BOW, WARP, STRESS and full TOPOGRAPHY MEASUREMENTS
HEATSINK APPLICATION NOTE: Please fill up form on the bottom of this page
to request new application note on heatsink metrology.
For glass metrology, click here.
For precision metrology of X-ray mirrors and small bow/warp/stress in reflective
wafers, click here.
The Opto-Profiler system is the optimum solution for measurement of bow and
warp of highly warped and structured wafer, solar cell, and other surfaces.
Range of applications includes:
- Solar cell metrology
- Coated glass flatness metrology
- Mechanical parts metrology
- Flat parts metrology
- Plastic, Metal and Composite Parts
- Micro-sockets (with microscope option)
- Laboratory components
- Packaging solutions for
- Pharmacological industry
- Forensics - blood splatters etc...
Zebra Opto-Profiler has following standard features (other features may be
implemented as engineering standard):
- Measures wafers from 0.5'' to 12'' diameter (Model P-1D or A3 up to 45
cm x 45 cm Model P-2E) . Special macro-lens option available for samples
smaller than 0.5'' (so called MACRO option)
- Measures rough surfaces, wet, surfaces
- Non-contact method
Please contact our marketing department for sample of measurement report.
Request sample measurements
Please contact us and arrange for our lab to provide you with measurement on your
own samples to better evaluate our Zebra Opto-Profiler technology.
1. Our tool in addition to topography also calculates _tensor_stress_ for simple
patterns. This is quite unique feature.
2. When considering capacitance competitors tools please note that they tend to be
optimized for round wafers. Please also notice significant edge exclusion.
3. When considering microscope scanners please note that most of them are
performing 1D scan only in reasonable time.
4. Interferometers tend to perform poorly on structured or rough surface (paint).
Our tool does not have this problem.
5. We will be also happy to implement your sample holder requirements even if they
deviate from SEMI standards.
Principle of Operation
Opto-Profiler measures topography of surface by projecting pattern. The projected
pattern is recorded by CCD camera system and analyzed in real time by image
analysis software. Curved surface of measured samples distort the recorded fringe
image pattern. Surface topography is measured by measuring distortion of the
Data acquisition with high resolution camera (offered with 5 MPixels and more)
Proprietary algorithm analyzes the observed distortion of projected pattern, and
provides fast, and accurate measurements of topography of uniform, colored, and
patterned surfaces. Analysis time is 10-50 seconds depending on features of
measured surfaces. For repetitive measurements of similar surfaces (as it is often
encountered in mass production) measurement and analysis can be further reduced to
below 1 second.
System employs class I light sources, and is safe for humans and animals.
The Optoprofiler hardware platform is based on a robust frame. The external tool
frame is vibration isolated from the internal metrology platform comprising sensors,
light sources and sample compartment. We provide more information and
photographs on hardware at this link.
Please contact our sales department for brochure describing metrology
and its specification in detail.
Our application engineers will be happy to provide you with specifications
corresponding to your specific application, and will be happy
to arrange system demonstration.