Optoprofiler

For more information about our products and services please contact us
and request our brochures and technical product information. Please, note,
that all specifications are subject to change without notice.

Tool for BOW, WARP, STRESS and full TOPOGRAPHY
MEASUREMENTS of wafers, solar cells and glass
metrology

For glass metrology, click here.

The Opto-Profiler system is the optimum solution for measurement of bow
and warp of highly warped and structured wafer, solar cell, and other
surfaces.
Range of applications includes:

Solar cell metrology
Coated glass flatness metrology
Mechanical parts metrology
Flat parts metrology
Plastic, Metal and Composite Parts
Micro-sockets (with microscope option)
Laboratory components
Packaging solutions for
pharmacological industry

ZebraOptical Optoprofiler                ZebraOptical Optoprofiler
Model P-1D                                             Model P-2E for large wafers
                          and minipanels

Zebra Optoprofiler
Macro Option

                                                                                   Zebra Optoprofiler
                                                                                      Model P-1PORT

Product features

Zebra Opto-Profiler has following standard features (other features may be
implemented as engineering standard):

Measures wafers from 0.5'' to 12'' diameter (Model P-1D or A3 up to
45 cm x 45 cm Model P-2E) . Special macro-lens option available for
samples smaller than 0.5'' (so called MACRO option)
Measures rough surfaces, wet, surfaces
Non-contact method

Please contact our marketing department for sample of measurement report.

Request sample measurements

Please contact us and arrange for our lab to provide you with measurement
on your own samples to better evaluate our Zebra Opto-Profiler technology.

Competitive advantages

1. Our tool in addition to topography also calculates _tensor_stress_ for
simple patterns. This is quite unique feature.

2. When considering capacitance competitors tools please note that they
tend to be optimized for round wafers. Please also notice significant edge
exclusion.

3. When considering microscope scanners please note that most of them
are performing 1D scan only in reasonable time.

4. Interferometers tend to perform poorly on structured or rough surface
(paint). Our tool does not have this problem.

5. We will be also happy to implement your sample holder requirements
even if they deviate from SEMI standards.

Principle of Operation

Opto-Profiler measures topography of surface by projecting pattern. The
projected pattern is recorded by CCD camera system and analyzed in real
time by image analysis software. Curved surface of measured samples
distort the recorded fringe image pattern. Surface topography is measured by
measuring distortion of the observed pattern.

Data acquisition with high resolution camera (offered with 5 MPixels and
more)

Proprietary algorithm analyzes the observed distortion of projected pattern,
and provides fast, and accurate measurements of topography of uniform,
colored, and patterned surfaces. Analysis time is 10-50 seconds depending
on features of measured surfaces. For repetitive measurements of similar
surfaces (as it is often encountered in mass production) measurement and
analysis can be further reduced to below 1 second.
System employs class I light sources, and is safe for humans and animals.

Hardware platform

The Optoprofiler hardware platform is based on a robust frame. The external
tool frame is vibration isolated from the internal metrology platform
comprising sensors, light sources and sample compartment. We provide
more information and photographs on hardware at this link.

Please contact our sales department for brochure describing metrology
and its specification in detail.

Our application engineers will be happy to provide you with specifications
corresponding to your specific application, and will be happy
to arrange system demonstration.