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Sunrise Optical LLC
5352 NW 93rd Terr
Sunrise FL 33351
Tel: 1 954 654 1734
Fax: 1 954 748 2302
5352 NW 93rd Terr
Sunrise FL 33351
Tel: 1 954 654 1734
Fax: 1 954 748 2302
Sunrise Optical LLC: Press Release 12/16/09
ZebraOptical CT-IR an Interferometric Probe for Substrate Thickness,
Topography, Trench Depth, Membrane Thickness and other
Applications from Sunrise Optical LLC
Sunrise, Florida, December 16, 2009
Sunrise Optical LLC has added a new Interferometric Probe Option to
Zebra OptoProfiler (CT-IR) for substrate topography, and thickness
metrology.
Zebra CT-IR option uses infrared (IR) interferometric technique, which
provides accurate substrate thickness measurement and thickness
variation (TTV) of thick to ultra-thin wafers for in-situ grinding, etching
and deposition applications. Most of materials transparent in IR beam,
such as Si, GaAs, InP, SiC, Glass, Quartz and many polymers are
readily measured with standard spatial resolution of 50 microns spot,
(smaller spot sizes are available). Using a single probe system,
substrate thickness of conventional wafers with patterns, tapes, bumps
or bonded wafers mounted on carriers can be determined with high
precision and accuracy.
The CT-IR sensor employs infrared (IR) interferometric technique,
which provides a direct and accurate substrate thickness
measurement and thickness variation (TTV) of thick to ultra-thin wafers
for in-situ grinding, etching and deposition applications. Various
specialized applications including Membrane Thickness and Bump
Height metrologies applications have been developed. Other options
available include trench depth and via holes, including high aspect ratio
trenches and vias in MEMs type applications. Data can be exported in
text format and analyzed by third party data analysis software
packages.
Product Availability
Sample measurement service is now available. Lead-time for tool is
currently 4 to 8 weeks ARO.
About Sunrise Optical LLC
Sunrise Optical LLC is an optical metrology company located in
Sunrise FL. It specializes in design and manufacturing of spectroscopic
and imaging systems for three-dimensional (3D) image acquisition
and development of new algorithms for three-dimensional (3D) image
processing. Sunrise Optical LLC is serving the solar cell
manufacturing, MEMs, and thin film metrology markets. More
information on Sunrise Optical LLC can be found on company website
www.zebraoptical.com.