5352 NW 93rd Terr
Sunrise FL 33351
Tel: 1 954 654 1734
Fax: 1 954 748 2302
Sunrise FL 33351
Tel: 1 954 654 1734
Fax: 1 954 748 2302
Sunrise Optical LLC: Press Release 12/16/09
Applications from Sunrise Optical LLC
Sunrise, Florida, December 16, 2009
Sunrise Optical LLC has added a new Interferometric Probe Option to
Zebra OptoProfiler (CT-IR) for substrate topography, and thickness
metrology.
Zebra CT-IR option uses infrared (IR) interferometric technique, which
provides accurate substrate thickness measurement and thickness
variation (TTV) of thick to ultra-thin wafers for in-situ grinding, etching
and deposition applications. Most of materials transparent in IR beam,
such as Si, GaAs, InP, SiC, Glass, Quartz and many polymers are
readily measured with standard spatial resolution of 50 microns spot,
(smaller spot sizes are available). Using a single probe system,
substrate thickness of conventional wafers with patterns, tapes, bumps
or bonded wafers mounted on carriers can be determined with high
precision and accuracy.
The CT-IR sensor employs infrared (IR) interferometric technique,
which provides a direct and accurate substrate thickness measurement
and thickness variation (TTV) of thick to ultra-thin wafers for in-situ
grinding, etching and deposition applications. Various specialized
applications including Membrane Thickness and Bump Height
metrologies applications have been developed. Other options available
include trench depth and via holes, including high aspect ratio trenches
and vias in MEMs type applications. Data can be exported in text format
and analyzed by third party data analysis software packages.
Product Availability
Sample measurement service is now available. Lead-time for tool is
currently 4 to 8 weeks ARO.
About Sunrise Optical LLC
Sunrise Optical LLC is an optical metrology company located in Sunrise
FL. It specializes in design and manufacturing of spectroscopic and
imaging systems for three-dimensional (3D) image acquisition and
development of new algorithms for three-dimensional (3D) image
processing. Sunrise Optical LLC is serving the solar cell manufacturing,
MEMs, and thin film metrology markets. More information on Sunrise
Optical LLC can be found on company website www.zebraoptical.com.
Sunrise, Florida, December 16, 2009
Sunrise Optical LLC has added a new Interferometric Probe Option to
Zebra OptoProfiler (CT-IR) for substrate topography, and thickness
metrology.
Zebra CT-IR option uses infrared (IR) interferometric technique, which
provides accurate substrate thickness measurement and thickness
variation (TTV) of thick to ultra-thin wafers for in-situ grinding, etching
and deposition applications. Most of materials transparent in IR beam,
such as Si, GaAs, InP, SiC, Glass, Quartz and many polymers are
readily measured with standard spatial resolution of 50 microns spot,
(smaller spot sizes are available). Using a single probe system,
substrate thickness of conventional wafers with patterns, tapes, bumps
or bonded wafers mounted on carriers can be determined with high
precision and accuracy.
The CT-IR sensor employs infrared (IR) interferometric technique,
which provides a direct and accurate substrate thickness measurement
and thickness variation (TTV) of thick to ultra-thin wafers for in-situ
grinding, etching and deposition applications. Various specialized
applications including Membrane Thickness and Bump Height
metrologies applications have been developed. Other options available
include trench depth and via holes, including high aspect ratio trenches
and vias in MEMs type applications. Data can be exported in text format
and analyzed by third party data analysis software packages.
Product Availability
Sample measurement service is now available. Lead-time for tool is
currently 4 to 8 weeks ARO.
About Sunrise Optical LLC
Sunrise Optical LLC is an optical metrology company located in Sunrise
FL. It specializes in design and manufacturing of spectroscopic and
imaging systems for three-dimensional (3D) image acquisition and
development of new algorithms for three-dimensional (3D) image
processing. Sunrise Optical LLC is serving the solar cell manufacturing,
MEMs, and thin film metrology markets. More information on Sunrise
Optical LLC can be found on company website www.zebraoptical.com.
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
